The AeroBar MP 5635 from Simco is a sophisticated ionizing bar with an active length of 1050 mm, specifically designed for use in extremely clean environments such as semiconductor manufacturing. This device meets the cleanliness standards of ISO 14644 Class 1 and offers precise control of static charges. Through modulated pulse technology (MP), it combines high-frequency sine waves with pulse modulation to ensure effective ionization and excellent lateral uniformity.
The emitter tips made of high-purity silicon, spaced 75 mm apart, support sensitive processes without compromising performance. Additionally, the user-friendly software allows fine-tuning of control parameters directly on the device. The AeroBar MP 5635 can be mounted up to 150 mm from sensitive components and supports air assistance for improved ion distribution.
The installation is simple and requires only a 24 V DC power source. An alarm output in the connection box provides the option to connect the device with machine controls or monitoring PCs. This ionizing bar is compatible with all wafer technology nodes including 22 nm and below, making it an ideal choice for advanced electronics and nanotechnology applications.
Details
- ISO according to 14644-1
ISO according to 14644-1
- 1
- Active length
Active length
- 1050 mm
- Emitter spacing
Emitter spacing
- 75 mm
- Emitters
Emitters
- 15
- Ion balance +/-
Ion balance +/-
- 20 V
- Working voltage
Working voltage
- 24 V/DC
- Height [mm]
Height [mm]
- 78 mm
- Length [mm]
Length [mm]
- 1150 mm
- Width [mm]
Width [mm]
- 34 mm
- Ambient temperature
Ambient temperature
- 15 - 35 °C
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