AeroBar MP 5635 Ionizing bar 1050 mm
Product Family
AeroBar MP 5635 Ionizing bar
- Ultra-clean design: It meets stringent cleanliness standards such as ISO 14644 Class 1 for particle-sensitive environments.
- Emitter tips: Made of high-purity silicon that ensures compatibility with sensitive processes.
- Users can fine-tune control parameters on the bar or use the user-friendly software to set optimal balance, voltage swing and discharge time.
- Proximity capability: Can be mounted up to 150mm away from sensitive components such as wafers without compromising performance.
- Additional features: Air assist for improved ion distribution, automatic balancing for precise static neutralization and alarm signals for operational feedback.
- Installation is quick by simply plugging into a 24 V DC power source.
- A compressed air line must be connected for air support.
- An alarm output in the connection box enables connection to a machine or system controller or evaluation via a monitoring PC.
- Compatible with all wafer technology concepts including 22 nm and below
- Dimensions: 78 x 34 x 450 - 1600 mm (WxHxL)
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Article description
ISO according to 14644-1
Active length
Emitter spacing
Emitters
Ion balance +/-
Working voltage
Height
Length
Width
Ambient temperature
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8
20 V
24 V/DC
78 mm
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15 - 35 °C
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500 mm
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20 V
24 V/DC
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900 mm
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20 V
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1
1050 mm
75 mm
15
20 V
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1
1500 mm
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