The AeroBar MP 5635 from Simco is a sophisticated ionizing bar specifically designed for use in sensitive environments such as semiconductor manufacturing. With a length of 1600 mm and an active length of 1500 mm, this ionization rod is ideal for processes where precise control of static charge and minimal contamination are required. The modulated pulse technology allows for high-frequency ionization with excellent lateral uniformity, while the emitter tips are made of high-purity silicon to ensure compatibility with sensitive processes.
The ionizing bar meets the purity standards of ISO 14644 Class 1 and offers a proximity capability of up to 150 mm. Additionally, the air support enhances ion distribution. The installation of the bar is straightforward and requires only a 24 V DC power source and a compressed air line for air support. An alarm output allows integration into existing machine controls or monitoring systems.
With dimensions of 78 mm in height, 34 mm in width, and a number of emitters totaling 31, the AeroBar MP 5635 delivers excellent performance and is compatible with all wafer technologies down to 22 nm. The user-friendly software allows fine-tuning of control parameters to achieve optimal results in static neutralization.
Details
- ISO according to 14644-1
ISO according to 14644-1
- 1
- Active length
Active length
- 1500 mm
- Emitter spacing
Emitter spacing
- 75 mm
- Emitters
Emitters
- 31
- Ion balance +/-
Ion balance +/-
- 20 V
- Working voltage
Working voltage
- 24 V/DC
- Height [mm]
Height [mm]
- 78 mm
- Length [mm]
Length [mm]
- 1600 mm
- Width [mm]
Width [mm]
- 34 mm
- Ambient temperature
Ambient temperature
- 15 - 35 °C
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