The AeroBar MP 5635 from Simco is a highly specialized ionizing bar designed for use in extremely clean environments such as semiconductor manufacturing. Thanks to the modulated pulse technology, which combines high-frequency sine waves with pulse modulation, the device provides effective ionization with excellent lateral uniformity.
The ionizing bar meets the stringent cleanliness standards of ISO 14644 Class 1 and is thus ideal for particle-sensitive processes. The emitter tips are made of high-purity silicon, ensuring high compatibility with sensitive processes. The AeroBar MP 5635 allows users to adjust control parameters directly on the device or via user-friendly software to achieve optimal balance, voltage fluctuation, and discharge time.
The device can be mounted up to 150 mm from sensitive components without impairing performance. It features air support for improved ion distribution, automatic balancing for precise static neutralization, and alarm signals for operational feedback. Installation is quick by connecting to a 24 V DC power source.
The dimensions of the bar are 78 x 34 x 600 mm (WxHxL), with an active length of 500 mm and an emitter distance of 50 mm. The ionizing bar operates at an ambient temperature of 15 to 35 °C and is compatible with all wafer technology nodes including 22 nm and below.
Details
- ISO according to 14644-1
ISO according to 14644-1
- 1
- Active length
Active length
- 500
- Emitter spacing
Emitter spacing
- 50 mm
- Emitters
Emitters
- 11
- Ion balance +/-
Ion balance +/-
- 20 V
- Working voltage
Working voltage
- 24 V/DC
- Height [mm]
Height [mm]
- 78 mm
- Length [mm]
Length [mm]
- 600 mm
- Width [mm]
Width [mm]
- 34 mm
- Ambient temperature
Ambient temperature
- 15 - 35 °C
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